MEMS accelerometer sensors have been developed in decade years at various techniques such as piezoelectric, piezo-resistive, and micro capacitive etc. But the optical technology will bring the new ...

A new approach is presented for fabricating monolithic crystalline silicon tilting-mirror microoptoelectromechanical systems (MOEMS) devices. The activation electrodes, etched from a thick silicon ...

Fraunhofer IAF's semi-automated process for MOEMS-EC-QCLs enhances manufacturing efficiency, reducing costs and enabling real-time spectroscopy applications.